Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures
1993 / 11 Vol. 11; Iss. 6
Fabrication of hard x-ray phase zone plate by x-ray lithography
Krasnoperova, A. A.Volume:
11
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.586630
Date:
November, 1993
File:
PDF, 810 KB
english, 1993