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Textured growth of cubic gallium nitride thin films on Si (100) substrates by sputter deposition
Kim, Joo Han, Holloway, Paul H.Volume:
22
Year:
2004
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.1705643
File:
PDF, 442 KB
english, 2004