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[IEEE 2006 8th International Conference on Solid-State and Integrated Circuit Technology Proceedings - Shanghai, China (2006.10.23-2006.10.26)] 2006 8th International Conference on Solid-State and Integrated Circuit Technology Proceedings - UV curing technology for advanced device fabrication: challenges and solutions
Waldfried, Carlo, Sakthivel, Palanikumaran, Frisella, Peter, Moore, Darren, Berry, Ivan, Durr, Kevin, Han, QingyuanYear:
2006
Language:
english
DOI:
10.1109/icsict.2006.306339
File:
PDF, 193 KB
english, 2006