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[IEEE 2013 Conference on Lasers and Electro-Optics Pacific Rim (CLEO-PR) - Kyoto, Japan (2013.06.30-2013.07.4)] 2013 Conference on Lasers and Electro-Optics Pacific Rim (CLEOPR) - Micromachining of polydimethylsiloxane using EUV light
Fukami, Shintaron, Torii, Shuichi, Makimura, Tetsuya, Okazaki, Kota, Nakamura, Daisuke, Takahashi, Akihiko, Okada, Tatsuo, Niino, Hiroyuki, Murakami, KoichiYear:
2013
Language:
english
DOI:
10.1109/cleopr.2013.6600551
File:
PDF, 744 KB
english, 2013