One-mask process for silicon accelerometers on Pyrex glass...

Electronics Letters 2003 Vol. 39; Iss. 8

One-mask process for silicon accelerometers on Pyrex glass utilising notching effect in inductively coupled plasma DRIE

Iliescu, C., Miao, J.
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Volume:
39
Year:
2003
Language:
english
Journal:
Electronics Letters
DOI:
10.1049/el:20030407
File:
PDF, 203 KB
english, 2003
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