Sub-femtofarad capacitive sensing for microfabricated...

Sub-femtofarad capacitive sensing for microfabricated transducers using correlated double sampling and delta modulation

Garverick, S.L., Roy, S., Inerfield, M., Ranganathan, S.
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Volume:
47
Language:
english
Journal:
IEEE Transactions on Circuits and Systems II: Analog and Digital Signal Processing
DOI:
10.1109/82.885125
Date:
January, 2000
File:
PDF, 149 KB
english, 2000
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