Reliability characterization of stress-induced charge...

Journal of Applied Physics 2009 Vol. 105; Iss. 10

Reliability characterization of stress-induced charge trapping in HfO[sub 2] by electrostatic discharge impulse stresses

Chen, Chun-Heng, Hwang, Huey-Liang, Chiu, Fu-Chien
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Volume:
105
Year:
2009
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.3132091
File:
PDF, 396 KB
english, 2009
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