[IEEE IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2005. - Oulu, Finland (Aug. 1-4, 2005)] IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2005. - High fill-factor micromirror array and its fabrication process
Jin-Wan Jeon,, Kirn, D.-H., Jun-Bo Yoon,, Koeng Su Lim,Year:
2005
Language:
english
DOI:
10.1109/omems.2005.1540072
File:
PDF, 418 KB
english, 2005