Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2011 Vol. 29; Iss. 3
Fabrication of InAlAs/InGaAsSb/InGaAs double heterojunction bipolar transistors
Lo, C. F., Ren, F., Chang, C. Y., Pearton, S. J., Chen, S.-H., Chang, C.-M., Wang, S.-Y., Chyi, J.-I., Kravchenko, I. I.Volume:
29
Year:
2011
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.3589808
File:
PDF, 847 KB
english, 2011