[IEEE 2007 Digest of papers Microprocesses and Nanotechnology - Kyoto, Japan (2007.11.5-2007.11.8)] 2007 Digest of papers Microprocesses and Nanotechnology - 3D nanofabrication by reverse contact UV nanoimprint lithography
Kehagias, N., Reboud, V., Chansin, G., Zelsmann, M., Jeppesen, C., Schuster, C., Reuther, F., Gruetzner, G., Torres, C. M. SotomayorYear:
2007
Language:
english
DOI:
10.1109/imnc.2007.4456277
File:
PDF, 959 KB
english, 2007