Location of positive charges in SiO2 films on Si generated...

Journal of Applied Physics 1977 Vol. 48; Iss. 3

Location of positive charges in SiO2 films on Si generated by vuv photons, x rays, and high-field stressing

DiMaria, D. J., Weinberg, Z. A., Aitken, J. M.
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Volume:
48
Year:
1977
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.323705
File:
PDF, 1.15 MB
english, 1977
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