[IEEE 1999 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop. ASMC 99 Proceedings - Boston, MA, USA (8-10 Sept. 1999)] 10th Annual IEEE/SEMI. Advanced Semiconductor Manufacturing Conference and Workshop. ASMC 99 Proceedings (Cat. No.99CH36295) - Application of a new laser scanning pattern wafer inspection tool to leading edge memory and logic applications at Infineon Technologies

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