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Growth of low-stress cubic boron nitride films by simultaneous medium-energy ion implantation
Fitz, C., Kolitsch, A., Möller, W., Fukarek, W.Volume:
80
Year:
2002
Language:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.1430268
File:
PDF, 242 KB
english, 2002