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[IEEE Symposium on VLSI Technology - Kyoto, Japan (1997.06.12-1997.06.12)] Symposium on VLSI Technology - An Integrated Isolation/Gate Process For Sub-quarter Micron Technologies
Kangar,, Hillenius,, Baker,, Nakahara,, Chang,, Chong-Cheng Fu,, Fritzinger,, Giniecki,Year:
1993
Language:
english
DOI:
10.1109/vlsit.1993.760288
File:
PDF, 275 KB
english, 1993