The role of particle energy and pulsed particle flux in physical vapor deposition and pulsed–laser deposition
Mayr, Stefan G., Moske, Michael, Samwer, Konrad, Taylor, Maggie E., Atwater, Harry A.Volume:
75
Year:
1999
Language:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.125546
File:
PDF, 364 KB
english, 1999