![](/img/cover-not-exists.png)
[IEEE 2007 IEEE International Electron Devices Meeting - Washington, DC, USA (2007.12.10-2007.12.12)] 2007 IEEE International Electron Devices Meeting - Highly Reliable Thin MIM Capacitor on Metal (CoM) Structure with Vertical Scalability for Analog/RF Applications
Inoue, N., Kume, I., Kawahara, J., Furutake, N., Toda, T., Matsui, K., Furumiya, M., Iwaki, T., Shida, S., Hayashi, Y.Year:
2007
Language:
english
DOI:
10.1109/iedm.2007.4419120
File:
PDF, 2.17 MB
english, 2007