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[IEEE 30th International Conference on Plasma Science - Jeju, South Korea (2-5 June 2003)] The 30th International Conference on Plasma Science, 2003. ICOPS 2003. IEEE Conference Record - Abstracts. - Effects of ion implantation on three-dimensional model systems by plasma based ion implantation
Ishii, T., Young-Joon Yang,, Fujita, K., Hibino, Y.Year:
2003
Language:
english
DOI:
10.1109/plasma.2003.1229942
File:
PDF, 76 KB
english, 2003