[IEEE International Conference on Plasma Science (papers in summary form only received) - Madison, WI, USA (1995.06.5-1995.06.8)] International Conference on Plasma Science (papers in summary form only received) - DC plasma potential pattern in low-pressure RF discharge
Lisovsky, V.A., Krasnikov, O.V.Year:
1995
Language:
english
DOI:
10.1109/plasma.1995.531581
File:
PDF, 125 KB
english, 1995