Influence of oxygen content on the structural and electrical characteristics of thin neodymium oxide gate dielectrics
Pan, Tung-Ming, Lee, Jian-Der, Yeh, Wen-WeiVolume:
101
Year:
2007
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.2426937
File:
PDF, 825 KB
english, 2007