Ion beam milling fabrication of a small off-axis...

Review of Scientific Instruments 2001 Vol. 72; Iss. 2

Ion beam milling fabrication of a small off-axis ellipsoidal mirror, diffraction limited to 1 μm resolution at 14 nm

Mercier, Raymond, Mullot, Michel, Lamare, Michel, Tissot, Gérard
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Volume:
72
Year:
2001
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.1340562
File:
PDF, 433 KB
english, 2001
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