Electron mobility in scaled silicon...

Applied Physics Letters 2009 Vol. 94; Iss. 7

Electron mobility in scaled silicon metal-oxide-semiconductor field-effect transistors on off-axis substrates

Qin, Guoxuan, Zhou, Han, Ramayya, Edwin B., Ma, Zhenqiang, Knezevic, Irena
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Volume:
94
Year:
2009
Language:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.3085961
File:
PDF, 428 KB
english, 2009
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