Selenium implanation into silicon studied by DLTS technique

Applied Physics Letters 1977 Vol. 31; Iss. 8

Selenium implanation into silicon studied by DLTS technique

Richou, F., Pelous, G., Lecrosnier, D.
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Volume:
31
Year:
1977
Language:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.89763
File:
PDF, 415 KB
english, 1977
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