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Optical, structural, and electrical characteristics of high dielectric constant zirconium oxide thin films deposited by spray pyrolysis
Aguilar-Frutis, M., Reyna-Garcia, G., Garcia-Hipolito, M., Guzman-Mendoza, J., Falcony, C.Volume:
22
Year:
2004
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.1701866
File:
PDF, 716 KB
english, 2004