A study of plasma-film interactions in He/H2, Ar/H2, and...

A study of plasma-film interactions in He/H2, Ar/H2, and Xe/H2 radio frequency sputtered a-Si:H

Albers, M. L., Shinar, J., Shanks, H. R.
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
64
Year:
1988
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.341736
File:
PDF, 1.81 MB
english, 1988
Conversion to is in progress
Conversion to is failed