Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2006 Vol. 24; Iss. 2
Real-time reflectometry-controlled focused-electron-beam-induced deposition of transparent materials
Perentes, A., Bret, T., Utke, I., Hoffmann, P., Vaupel, M.Volume:
24
Year:
2006
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.2170096
File:
PDF, 788 KB
english, 2006