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[IEEE 2008 International Conference on Control, Automation and Systems (ICCAS) - Seoul, South Korea (2008.10.14-2008.10.17)] 2008 International Conference on Control, Automation and Systems - A miniaturized nano-motion stage driven by piezo stacks
Choi, Kee-Bong, Lee, Jae Jong, Kim, Gee HongYear:
2008
Language:
english
DOI:
10.1109/iccas.2008.4694384
File:
PDF, 515 KB
english, 2008