[IEEE 2013 IEEE International Conference on Mechatronics and Automation (ICMA) - Takamatsu, Kagawa, Japan (2013.08.4-2013.08.7)] 2013 IEEE International Conference on Mechatronics and Automation - Development of multi head review system using the planar stage
Lee, Seokho, Lee, Hansung, Kim, Jongmyung, Kim, Beomsu, Jung, SoohwaYear:
2013
Language:
english
DOI:
10.1109/icma.2013.6618059
File:
PDF, 952 KB
english, 2013