Effects of the trapping dust particles on the sheath...

Effects of the trapping dust particles on the sheath structure in radio-frequency discharges

Wang, Dezhen, Sheng, Mingyu
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
94
Year:
2003
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.1586989
File:
PDF, 351 KB
english, 2003
Conversion to is in progress
Conversion to is failed