Time-Resolved Electron Energy Distributions and Plasma...

IEEE Transactions on Plasma Science 2011 / 11 Vol. 39; Iss. 11

Time-Resolved Electron Energy Distributions and Plasma Characteristics in a Pulsed Capacitively Coupled Plasma

Song, Sang-Heon, Kushner, Mark J.
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Volume:
39
Language:
english
Journal:
IEEE Transactions on Plasma Science
DOI:
10.1109/tps.2011.2132743
Date:
November, 2011
File:
PDF, 370 KB
english, 2011
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