Effect of Ge on the segregation of B in Si(100) and Si(110)
Thompson, P. E., Silvestre, C., Jernigan, G., Hobart, K., Simons, D. S., Gregg, M. R.Volume:
81
Year:
1997
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.365359
File:
PDF, 378 KB
english, 1997