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Development of a virtual probe tip with an application to high aspect ratio microscale features
Bauza, Marcin B., Hocken, Robert J., Smith, Stuart T., Woody, Shane C.Volume:
76
Year:
2005
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.2052027
File:
PDF, 1.01 MB
english, 2005