Summary Abstract: Chemical vapor deposition of titanium...

Summary Abstract: Chemical vapor deposition of titanium oxides

Fredriksson, Eva
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Volume:
4
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.573710
Date:
November, 1986
File:
PDF, 361 KB
english, 1986
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