Spectroscopic ellipsometry and x-ray photoelectron spectroscopy of La[sub 2]O[sub 3] thin films deposited by reactive magnetron sputtering
Atuchin, V. V., Kalinkin, A. V., Kochubey, V. A., Kruchinin, V. N., Vemuri, R. S., Ramana, C. V.Volume:
29
Year:
2011
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.3539069
File:
PDF, 568 KB
english, 2011