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[IEEE 2003 IEEE International Symposium on Semiconductor Manufacturing. Conference Proceedings - San Jose, CA, USA (30 Sept.-2 Oct. 2003)] 2003 5th International Conference on ASIC. Proceedings (IEEE Cat. No.03TH8690) - Diffusion bay simulation and its impact on the overall FAB performance: a simplified example
Collins, D.W., Flores-Godoy, J.-J., Tsakalis, K.S., Hoppensteadt, F.C.Year:
2003
Language:
english
DOI:
10.1109/issm.2003.1243291
File:
PDF, 271 KB
english, 2003