Silicon nitride islands as oxidation masks for the...

Silicon nitride islands as oxidation masks for the formation of silicon nanopillars

Ha, Jeong Sook, Park, Kang-Ho, Yun, Wan Soo, Lee, El-Hang
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Volume:
17
Year:
1999
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.582100
File:
PDF, 595 KB
english, 1999
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