Simplified cascaded arc discharge source for production of a processing plasma
Okuno, Yoshihiro, Yagura, Shinya, Ishikura, Hiroshi, Fujita, HiroharuVolume:
64
Year:
1993
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.1144102
File:
PDF, 918 KB
english, 1993