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Simplified cascaded arc discharge source for production of...

Simplified cascaded arc discharge source for production of a processing plasma

Okuno, Yoshihiro, Yagura, Shinya, Ishikura, Hiroshi, Fujita, Hiroharu
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Volume:
64
Year:
1993
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.1144102
File:
PDF, 918 KB
english, 1993
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