Single-crystal silicon high-Q torsional oscillators

Review of Scientific Instruments 1985 Vol. 56; Iss. 11

Single-crystal silicon high-Q torsional oscillators

Kleiman, R. N., Kaminsky, G. K., Reppy, J. D., Pindak, R., Bishop, D. J.
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Volume:
56
Year:
1985
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.1138425
File:
PDF, 608 KB
english, 1985
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