A laser interferometer for measuring straightness and its...

Review of Scientific Instruments 2009 Vol. 80; Iss. 11

A laser interferometer for measuring straightness and its position based on heterodyne interferometry

Chen, Benyong, Zhang, Enzheng, Yan, Liping, Li, Chaorong, Tang, Wuhua, Feng, Qibo
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Volume:
80
Year:
2009
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.3266966
File:
PDF, 548 KB
english, 2009
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