![](/img/cover-not-exists.png)
[IEEE TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference - Lyon, France (2007.06.10-2007.06.14)] TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference - Alumina MEMS Platform for Impulse Semiconductor and IR Optic Gas Sensors
Vasiliev, A. A., Pavelko, R. G., Gogish-Klushin, S. Yu., Kharitonov, D. Yu., Gogish-Klushina, O. S., Sokolov, A. V., Samotaev, N. N.Year:
2007
Language:
english
DOI:
10.1109/sensor.2007.4300563
File:
PDF, 1.19 MB
english, 2007