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Young’s modulus measurement of two-photon polymerized micro-cantilevers by using nanoindentation equipment
Cicha, Klaus, Koch, Thomas, Torgersen, Jan, Li, Zhiquan, Liska, Robert, Stampfl, JürgenVolume:
112
Year:
2012
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.4764330
File:
PDF, 1.07 MB
english, 2012