Residual-layer-free printing by selective filling of...

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 2011 Vol. 29; Iss. 4

Residual-layer-free printing by selective filling of self-assembled monolayer-treated mold

Hong, Franklin Chau-Nan, Kao, Yu-Chih
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Volume:
29
Year:
2011
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.3596558
File:
PDF, 595 KB
english, 2011
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