Detection of nitrogen related traps in nitrided/reoxidized silicon dioxide films with thermally stimulated current and maximum entropy method
Yonamoto, Yoshiki, Inaba, Yutaka, Akamatsu, NaotosihVolume:
98
Year:
2011
Language:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.3596455
File:
PDF, 505 KB
english, 2011