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An ultrahigh vacuum compatible gimbled inspection mirror and ceramic scraper for the vacuum generators ESCALAB
Jayne, DouglasVolume:
8
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.577049
Date:
January, 1990
File:
PDF, 377 KB
english, 1990