[IEEE 2006 IEEE International Conference on Semiconductor Electronics - Kuala Lumpur, Malaysia (2006.10.29-2006.12.1)] 2006 IEEE International Conference on Semiconductor Electronics - The Characterization of KrF Photoresists and the Effect of Different Chromophore Bulkiness on Line Edge Roughness (LER) for Submicron Technology
Bakri, Ahmad Yusri Mohamed, Manaf, Mohd. Jeffery, Wahab, Kader Ibrahim Abdul, Ahmad, Ibrahim BinYear:
2006
Language:
english
DOI:
10.1109/smelec.2006.380781
File:
PDF, 2.56 MB
english, 2006