Center-Shift Method for the Characterization of Dielectric...

IEEE Transactions on Semiconductor Manufacturing 2008 / 05 Vol. 21; Iss. 2

Center-Shift Method for the Characterization of Dielectric Charging in RF MEMS Capacitive Switches

Herfst, Rodolf W., Steeneken, Peter G., Huizing, H. G. A. (Bert), Schmitz, Jurriaan
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Volume:
21
Language:
english
Journal:
IEEE Transactions on Semiconductor Manufacturing
DOI:
10.1109/tsm.2008.2000285
Date:
May, 2008
File:
PDF, 1.16 MB
english, 2008
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