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Studies of the oxidation states of phosphorus gettered silicon substrates using X-ray photoelectron spectroscopy and transmission electron microscopy
Tho̸gersen, Annett, Syre, Marie, Retterstol Olaisen, Birger, Diplas, SpyrosVolume:
113
Year:
2013
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.4775818
File:
PDF, 1.64 MB
english, 2013