On-chip stress relaxation testing method for freestanding thin film materials
Coulombier, M., Guisbiers, G., Colla, M.-S., Vayrette, R., Raskin, J.-P., Pardoen, T.Volume:
83
Year:
2012
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.4758288
File:
PDF, 1.11 MB
english, 2012