Chemical vapor deposition of Ru thin films by direct liquid...

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 2000 Vol. 18; Iss. 5

Chemical vapor deposition of Ru thin films by direct liquid injection of Ru(OD)[sub 3] (OD=octanedionate)

Lee, Jung-Hyun, Kim, Joo-Young, Rhee, Shi-Woo, Yang, DooYoung, Kim, Dong-Hyun, Yang, Cheol-Hoon, Han, Young-Ki, Hwang, Chul-Ju
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Volume:
18
Year:
2000
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.1289693
File:
PDF, 819 KB
english, 2000
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