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A tuning fork based wide range mechanical characterization tool with nanorobotic manipulators inside a scanning electron microscope
Acosta, Juan Camilo, Hwang, Gilgueng, Polesel-Maris, Jéro^me, Régnier, StéphaneVolume:
82
Year:
2011
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.3541776
File:
PDF, 1.03 MB
english, 2011