Impression of high voltage pulses on substrate in pulsed...

Impression of high voltage pulses on substrate in pulsed laser deposition

Ikegami, T., Nakao, M., Ohsima, T., Ebihara, K., Aoqui, S.
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Volume:
19
Year:
2001
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.1401744
File:
PDF, 576 KB
english, 2001
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